Title
A platform for European CMOS image sensors for space applications
Author
Minoglou, K.
San Segundo Bello, D.
Sabuncuoglu Tezcan, D.
Haspeslagh, L.
van Olmen, J.
Merry, B.
Cavaco, C.
Mazzamuto, F.
Toqué-Trésonne, I.
Moirin, R.
Brouwer, E.A.M.
Toccafondi, M.
Preti, G.
Rosmeulen, M.
de Moor, P.
Contributor
Sodnik, Z. (editor)
Cugny, B. (editor)
Karafolas, N. (editor)
Publication year
2014
Abstract
Both ESA and the EC have identified the need for a supply chain of CMOS imagers for space applications which uses solely European sources. An essential requirement on this supply chain is the platformization of the process modules, in particular when it comes to very specific processing steps, such as those required for the manufacturing of backside illuminated image sensors. This is the goal of the European (EC/FP7/SPACE) funded project EUROCIS. All EUROCIS partners have excellent know-how and track record in the expertise fields required. Imec has been leading the imager chip design and the front side and backside processing. LASSE, as a major player in the laser annealing supplier sector, has been focusing on the optimization of the process related to the backside passivation of the image sensors. TNO, known worldwide as a top developer of instruments for scientific research, including space research and sensors for satellites, has contributed in the domain of optical layers for space instruments and optimized antireflective coatings. Finally, Selex ES, as a world-wide leader for manufacturing instruments with expertise in various space missions and programs, has defined the image sensor specifications and is taking care of the final device characterization. In this paper, an overview of the process flow, the results on test structures and imagers processed using this platform will be presented.
Subject
Physics & Electronics
OPT - Optics
TS - Technical Sciences
Space & Scientific Instrumentation
Industrial Innovation
Antireflection coatings
CMOS integrated circuits
Image sensors
Space applications
Space flight
Space research
Supply chains
Anti reflective coatings
Backside-illuminated
CMOS image sensor
Device characterization
Laser annealing
Space instruments
Image processing
To reference this document use:
http://resolver.tudelft.nl/uuid:5c859de0-c622-4d08-beec-423d0b3f3964
DOI
https://doi.org/10.1117/12.2304233
TNO identifier
842176
Publisher
SPIE
ISBN
9781510616158
ISSN
0277-786X
Source
International Conference on Space Optics, ICSO 2014, 7-10 October 2014, La Caleta, Tenerife, Canary Islands, 10563
Series
Proceedings of SPIE - The International Society for Optical Engineering
Article number
1056304
Document type
conference paper