Title
Integrated optomechanical sensing for semiconductor metrology
Author
Fiore, A.
Galeotti, F.
Liu, T.
Petruzzella, M.
Sersic-Vollenbroek, I.
Lindgren, G.G.
Pagliano, F.
van Otten, F.W.M.
van Veldhoven, P.J.
Pogoretskiy, V.
Jiao, Y.
Mohtashami, A.
Sadeghian Marnani, H.
van der Heijden, R.W.
Publication year
2021
Abstract
In this talk we will present recent process on the integration of nano-opto-electro-mechanical sensors with photonic circuits and optical read-out, showing a route towards fully-integrated optical sensing.
Subject
Opto-mechanical sensing
Semiconductor metrology
High Tech Systems & Materials
Industrial Innovation
To reference this document use:
http://resolver.tudelft.nl/uuid:5ad584fa-55e0-4dc5-921e-c6163ff0d015
TNO identifier
961296
Publisher
Institute of Electrical and Electronics Engineers IEEE
ISBN
9781557528209
Source
QELS_Fundamental Science, CLEO, QELS 2021, Part of Conference on Lasers and Electro-Optics, CLEO 2021 Virtual, Online, 9-14 May 2021
Document type
conference paper