Title
Development of a sample clamp for GHZ subsurface probe microscopy
Author
van Neer, P.L.M.J.
van Riel, M.C.J.M.
van Es, M.H.
Shoeibi Omrani, P.S.
Hatakeyama, K.
Mohtashami, A.
Quesson, B.A.J.
van der Lans, M.J.
Sadeghian Marnani, H.
Publication year
2019
Subject
High Tech Systems & Materials
Industrial Innovation
GHZ subsurface probe microscopy
Microscopy
Sample clamp
ERP Early Research Program
ERP 3D Nanomanufacturing Instruments
To reference this document use:
http://resolver.tudelft.nl/uuid:52aafe1a-7ec4-4879-ad8e-c47238f551d8
TNO identifier
868201
Publisher
TNO, Delft
Source
SID Semicon Innovation Day, Science Centre Delft, 21 May 2019
Bibliographical note
Presented poster
Document type
other