Title
Lithographic patterning of metals on flexible plastic foils
Author
Peter, M.
Furthner, F.
Deen, J.
de Laat, W.J.M.
Meinders, E.R.
TNO Industrie en Techniek
Publication year
2009
Abstract
In this paper the challenges of patterning electrodes with separations in the micron and sub-micron range onto thin polyethylene naphthalate foils for use in biochips are discussed. It was found that it was necessary to improve the adhesion of the metal electrodes to the foil by using plasma treatment and/or an adhesion layer, and a quantitative measurement of this adhesion was preformed using a peel-off tester. Electrode patterning was performed by optical lithography. Two processing methodologies were compared, namely direct patterning of metal films and patterning using a lift-off process. In addition, the effects of organic solvents, sonication, and temperature on film quality were assessed. After optimization of process conditions, biochips with sub-micrometer sized electrode gaps and stable electrode structures were obtained by using the lift-off process. © 2008 Elsevier B.V. All rights reserved.
Subject
Materials
Industrial Innovation
Biochip
Metal adhesion
Photolithography on flexible substrates
Bioassay
Biochips
Electrodes
Metals
Organic solvents
Photolithography
Plasma applications
Thickness measurement
Adhesion layers
Biochip
Direct-patterning
Electrode gaps
Electrode structures
Film qualities
Flexible plastics
Lift-off process
Lithographic patterning
Metal electrodes
Metal films
Optical lithographies
Patterning electrodes
PEN foils
Plasma treatments
Polyethylene naphthalate
Process conditions
Quantitative measurements
Sub micrometers
Sub microns
Metal foil
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TNO identifier
241449
ISSN
0040-6090
Source
Thin Solid Films, 517 (10), 3081-3086
Document type
article