Print Email Facebook Twitter Lithographic patterning of metals on flexible plastic foils Title Lithographic patterning of metals on flexible plastic foils Author Peter, M. Furthner, F. Deen, J. de Laat, W.J.M. Meinders, E.R. TNO Industrie en Techniek Publication year 2009 Abstract In this paper the challenges of patterning electrodes with separations in the micron and sub-micron range onto thin polyethylene naphthalate foils for use in biochips are discussed. It was found that it was necessary to improve the adhesion of the metal electrodes to the foil by using plasma treatment and/or an adhesion layer, and a quantitative measurement of this adhesion was preformed using a peel-off tester. Electrode patterning was performed by optical lithography. Two processing methodologies were compared, namely direct patterning of metal films and patterning using a lift-off process. In addition, the effects of organic solvents, sonication, and temperature on film quality were assessed. After optimization of process conditions, biochips with sub-micrometer sized electrode gaps and stable electrode structures were obtained by using the lift-off process. © 2008 Elsevier B.V. All rights reserved. Subject MaterialsIndustrial InnovationBiochipMetal adhesionPhotolithography on flexible substratesBioassayBiochipsElectrodesMetalsOrganic solventsPhotolithographyPlasma applicationsThickness measurementAdhesion layersBiochipDirect-patterningElectrode gapsElectrode structuresFilm qualitiesFlexible plasticsLift-off processLithographic patterningMetal electrodesMetal filmsOptical lithographiesPatterning electrodesPEN foilsPlasma treatmentsPolyethylene naphthalateProcess conditionsQuantitative measurementsSub micrometersSub micronsMetal foil To reference this document use: http://resolver.tudelft.nl/uuid:4bc21f9b-37e4-4e8c-9562-760a6fd0e202 TNO identifier 241449 ISSN 0040-6090 Source Thin Solid Films, 517 (10), 3081-3086 Document type article Files To receive the publication files, please send an e-mail request to TNO Library.