Atmospheric spatial atomic-layer-deposition of Zn(O,S) buffer layer for flexible Cu(In,Ga)Se2 solar cells: From lab-scale to large area roll to roll processing
van den Brink, J.
In this manuscript we present the first successful application of a spatial atomic-layer-deposition process to thin film solar cells. Zn(O,S) has been grown by spatial atomic layer deposition (S-ALD) at atmospheric pressure and applied as buffer layer in rigid and flexible CIGS cells by a lab-scale (15×15 cm2) S-ALD set-up. We achieved values of cell efficiency (16 %) higher than the reference cells on glass substrate. © 2017 IEEE. Newport
To reference this document use:
Thin film solar cells
Cu(In , Ga)Se2
Atomic layer deposition
Institute of Electrical and Electronics Engineers Inc.
44th IEEE Photovoltaic Specialist Conference, PVSC 2017. 25 June 2017 through 30 June 2017, 1-3