Title
Atmospheric spatial atomic-layer-deposition of Zn(O,S) buffer layer for flexible Cu(In,Ga)Se2 solar cells: From lab-scale to large area roll to roll processing
Author
Frijters, C.H.
Bolt, P.J.
Poodt, P.
Knaapen, R.
van den Brink, J.
Ruth, M.
Bremaud, D.
Illiberi, A.
Publication year
2017
Abstract
In this manuscript we present the first successful application of a spatial atomic-layer-deposition process to thin film solar cells. Zn(O,S) has been grown by spatial atomic layer deposition (S-ALD) at atmospheric pressure and applied as buffer layer in rigid and flexible CIGS cells by a lab-scale (15×15 cm2) S-ALD set-up. We achieved values of cell efficiency (16 %) higher than the reference cells on glass substrate. © 2017 IEEE. Newport
Subject
Atmospheric pressure
Atoms
Buffer layers
Solar cells
Substrates
Thin film solar cells
Cell efficiency
Cu(In , Ga)Se2
Glass substrates
Roll-to-roll processing
Zn(O ,S)
Atomic layer deposition
To reference this document use:
http://resolver.tudelft.nl/uuid:46a5f764-b8a7-4317-9946-e9cda753e93c
TNO identifier
810209
Publisher
Institute of Electrical and Electronics Engineers Inc.
ISBN
9781509056057
Source
44th IEEE Photovoltaic Specialist Conference, PVSC 2017. 25 June 2017 through 30 June 2017, 1-3
Document type
conference paper