Title
Detection of low concentration formaldehyde gas by photonic crystal sensor fabricated by nanoimprint process in polymer material
Author
Boersma, A.
van Ee, R.J.
Stevens, R.S.A.
Saalmink, M.
Charlton, M.D.B.
Pollard, M.E.
Chen, R.
Kontturi, V.
Karioja, P.
Alajoki, T.
Publication year
2014
Abstract
This paper describes experimental measurement results for photonic crystal sensor devices which have been functionalized for gas sensing applications. The sensor consists of a two dimensional photonic crystal etched into a slab waveguide having a refractive index of 1.7-1.9. Test devices were fabricated from SiON material on silicon/ silicon dioxide platform, and also in polymer materials on silicon platform. The inorganic photonic crystals were made using direct write electron-beam lithography and reactive ion etching. The polymeric devices were made by nano-imprint lithography using the SiON structure as the imprint master. The high refractive index polymer was composed of a TiO 2- UV resin nanocomposite having a nanoparticle fraction between 50 and 60 wt%. This resulted in a tunable refractive index between 1.7 and 1.85. Devices were functionalized for gas sensing applications by coating the surface with a chemical receptor. This responsive layer reacts with the target gas and changes its refractive index. This change causes the angle of out-coupling to change slightly. In this paper we report successful detection of formaldehyde in air at sub ppm levels, and discuss details of chemical functionalization of the PC sensor. cop. 2014 SPIE.
Subject
Mechanics, Materials and Structures
MIP - Materials for Integrated Products
TS - Technical Sciences
Industrial Innovation
Nanoimprint lithography
Chemical detection
Chemical sensors
Electron beam lithography
Formaldehyde
Gas detectors
Nanoimprint lithography
Polymers
Refractive index
Chemical functionalization
Direct write electron-beam lithography
E-beam processing
Gas sensing applications
High refractive index
Low-concentration formaldehydes
Photonic crystal sensors
Two-dimensional photonic crystals
Photonic crystals
To reference this document use:
http://resolver.tudelft.nl/uuid:45e8dc84-2db0-46a2-b4da-f941d9151a7c
TNO identifier
513344
Publisher
SPIE
ISBN
9781628410891
ISSN
1996-756X
Source
Optical Sensing and Detection III, 14-17 April 2014, Brussels, Belgium, 9141
Series
Proceedings of SPIE - The International Society for Optical Engineering
Article number
91410F
Document type
conference paper