Print Email Facebook Twitter Toward 3D Thin-Film Batteries: Optimal Current-Collector Design and Scalable Fabrication of TiO 2 Thin-Film Electrodes Title Toward 3D Thin-Film Batteries: Optimal Current-Collector Design and Scalable Fabrication of TiO 2 Thin-Film Electrodes Author Moitzheim, S. Balder, J.E. Ritasalo, R. Ek, S. Poodt, P. Unnikrishnan, S. de Gendt, S. Vereecken, P.M. Publication year 2019 Abstract Three-dimensional (3D) thin-film solid-state batteries are an interesting concept for microstorage, promising high footprint capacity, fast charging, safety, and long lifetime. However, to realize their commercialization, several challenges still need to be overcome. In this work, we focus on two issues: the conformal coating and the high throughput deposition of thin-film layers. First, to facilitate conformal deposition, a design based on 3D micropillars is chosen. Although such a design has been suggested in the past, we calculate for the first time what (footprint) capacities can be expected when using fully optimized pillar geometries while taking practical manufacturability into consideration. Next, spatial atomic layer deposition (S-ALD) is investigated as a scalable and conformal deposition technique. As proof-of-concept, 100 nm Cl-doped am-TiO 2 thin-film electrodes are deposited by S-ALD on TiN-coated silicon micropillars. The influence of deposition parameters (i.e., exposure time and temperature) on the conformality and uniformity across the micropillar substrate is investigated. The results are discussed in terms of precursor diffusion and depletion, which is supported by an analytical model developed for our micropillar array. Furthermore, the Li-ion insertion properties of 3D electrodes fabricated by S-ALD and conventional ALD are compared. This research highlights the challenges and promises of 3D microbatteries and guides future S-ALD development to enable conformal and high-throughput thin-film deposition. Subject Industrial Innovation3D current-collectorThin-filmLi-ion batteryAtomic layer depositionTitania To reference this document use: http://resolver.tudelft.nl/uuid:45302bda-ae7a-48bd-9036-efe7102c7f57 DOI https://doi.org/10.1021/acsaem.8b01905/ TNO identifier 866950 Publisher American Chemical Society ISSN 2574-0962 Source ACS Applied Energy Materials, 2 (3), 1774-1783 Document type article Files To receive the publication files, please send an e-mail request to TNO Library.