Print Email Facebook Twitter Towards Quantitative Stiffness based Subsurface AFM Title Towards Quantitative Stiffness based Subsurface AFM Author Piras, D. Fillinger, L. Rajadurai, S.R.S. van Es, M.H. van der Lans, M.J. Publication year 2019 Abstract In order to make stiffness based subsurface AFM a quantitative imaging modality, the experimental subsurface measurement must be interpreted with a versatile forward (and inverse) model. We have developed a fully parametric finite element model framework for the quantification of critical dimensions relevant in semicon applications. After identification of the most relevant geometrical parameters, we have made a versatile tool to be used for the analysis and prediction of complex layouts that are relevant for the semiconductor industry. The framework is built and executed in the COMSOL Multiphysics/MATLAB interface. Subject High Tech Systems & MaterialsIndustrial InnovationQuantitative stiffness based Subsurface AFMERP Early Research Program3D Nanomanufacturing Instruments To reference this document use: http://resolver.tudelft.nl/uuid:3e5c56a0-63a9-4f7d-a0a5-5edaf1b9200d TNO identifier 867667 Publisher TNO, Delft Source SID Semicon Innovation Day, Science Centre Delft, 21 May 2019 Bibliographical note Presented poster Document type other Files To receive the publication files, please send an e-mail request to TNO Library.