Title
Towards Quantitative Stiffness based Subsurface AFM
Author
Piras, D.
Fillinger, L.
Rajadurai, S.R.S.
van Es, M.H.
van der Lans, M.J.
Publication year
2019
Abstract
In order to make stiffness based subsurface AFM a quantitative imaging modality, the experimental subsurface measurement must be interpreted with a versatile forward (and inverse) model. We have developed a fully parametric finite element model framework for the quantification of critical dimensions relevant in semicon applications. After identification of the most relevant geometrical parameters, we have made a versatile tool to be used for the analysis and prediction of complex layouts that are relevant for the semiconductor industry. The framework is built and executed in the COMSOL Multiphysics/MATLAB interface.
Subject
High Tech Systems & Materials
Industrial Innovation
Quantitative stiffness based Subsurface AFM
ERP Early Research Program
3D Nanomanufacturing Instruments
To reference this document use:
http://resolver.tudelft.nl/uuid:3e5c56a0-63a9-4f7d-a0a5-5edaf1b9200d
TNO identifier
867667
Publisher
TNO, Delft
Source
SID Semicon Innovation Day, Science Centre Delft, 21 May 2019
Bibliographical note
Presented poster
Document type
other