Title
Demonstrator for nano-precision multi-agent MagLev positioning platform for high throughput metrology
Author
Kramer, L.
van den Dool, T.C.
Witvoet, G.
Contributor
Jadachowski, L. (editor)
Publication year
2019
Abstract
Abstract: High throughput qualification of semiconductor devices is needed to improve cost efficiency. This paper describes a nano-precision capable, multi-agent, flexible positioning platform, which can be used to increase (metrology) throughput in semiconductor industry by parallelization of measurements. It is based on magnetic levitation and control in 6-DoF, combining large x- and y-motions with sub-nanometer scanning resolution in a single stage. The system architecture of this flexible positioning platform has the ability to operate many devices in parallel. Each device can function as a lab-on-instrument to perform various tasks at the nanoscale, e.g. metrology, inspection, deposition, transport, cleaning, etc. A demonstrator setup was successfully designed, built and tested. With coarse positioning sensors a position resolution at sub-micrometer level is achieved, while the maximum acceleration and speed are above 10m/s2 and 1m/s respectively. Future testing includes integration of sub-nanometer-precision sensors and local control optimization to demonstrate sub-nanometer scanning performances.
Subject
Atomic Force Microscopy
Electro-magnetic actuation
Lab-on-instrument
Maglev
Metrology
Nano-precision
Planar motor
Positioning platform
High Tech Systems & Materials
Industrial Innovation
To reference this document use:
http://resolver.tudelft.nl/uuid:371dec76-79a0-4921-92cc-8b384059c8c1
DOI
https://doi.org/10.1016/j.ifacol.2019.11.720
TNO identifier
955112
Publisher
Elsevier, Amsterdam
ISSN
2405-8963
Source
8th IFAC Symposium on Mechatronic Systems, MECHATRONICS 2019, 4-6 September 2019, Vienna, Austria, 471-476
Document type
conference paper