Title
Large-Area Atmospheric-Pressure Spatial ALD enabling All-Solid-State 3D Batteries with Ultrathin LiPON and High-Capacity Electrodes
Author
Ameen, M.
Poplawski, M.
Haverkate, L.
Grob, F.
Anothumakkool, B.
Hermes, D.
del Khandan, S.
Roozeboom, F.
Unnikrishnan, S.
Publication year
2019
Subject
Industrial Innovation
Atomic layer deposition
Spatial ALD
3D Batteries
LiPON electrodes
High-capacity electrodes
Solid state batteries
To reference this document use:
http://resolver.tudelft.nl/uuid:36cbd5cd-9e33-474f-b0f9-e341d8f8a85e
TNO identifier
869524
Article number
A07-0632
Bibliographical note
236th ECS Meeting, Atlanta, Oct. 13-17, 2019
Document type
public lecture