Title
Demonstration of Parallel Scanning Probe Microscope for high throughput metrology and inspection
Author
Sadeghian Marnani, H.
Dekker, A.
Herfst, R.W.
Winters, J.
Eigenraam, A.B.C.
Rijnbeek, R.A.
Nulkes, N.
Contributor
Cain, J.P. (editor)
Sanchez, M.I. (editor)
Publication year
2015
Abstract
With the device dimensions moving towards the 1X node and below, the semiconductor industry is rapidly approaching the point where existing metrology, inspection and review tools face huge challenges in terms of resolution, the ability to resolve 3D and the throughput. Due to the advantages of sub-nanometer resolution and the ability of true 3D scanning, scanning probe microscope (SPM) and specifically atomic force microscope (AFM) are considered as alternative technologies for CD-metrology, defect inspection and review of 1X node and below. In order to meet the increasing demand for resolution and throughput of CD-metrology, defect inspection and review, TNO has previously introduced the parallel SPM concept, consisting of parallel operation of many miniaturized SPMs on a 300 and 450 mm wafer. In this paper we will present the proof of principle of the parallelization for metrology and inspection. To give an indication of the system’s specifications, the throughput of scanning is 4500 sites per hour, each within an area of 1 μm2 and 1024 ×1024 pixels.
Subject
Mechatronics, Mechanics & Materials
OM - Opto-Mechatronics
TS - Technical Sciences
High Tech Systems & Materials
Electronics
Industrial Innovation
Parallel atomic force microscope
Scanning probe microscope
Wafer
Mask
CD-metrology
Defect review
Process control
To reference this document use:
http://resolver.tudelft.nl/uuid:33268b1f-f7ec-406f-8777-abcd068f703a
TNO identifier
524287
Publisher
SPIE
ISSN
0277-786X
Source
SPIE Advanced Lithography conference on Metrology, Inspection, and Process Control for Microlithography XXIX, 22-26 February 2015, San Jose, California, USA, 9424
Series
Proceedings of SPIE - The International Society for Optical Engineering
Document type
conference paper