Print Email Facebook Twitter Novel nanosample preparation with a helium ion microscope Title Novel nanosample preparation with a helium ion microscope Author Rudneva, M. van Veldhoven, E. Malladi, S.K. Maas, D.J. Zandbergen, H.W. Publication year 2013 Abstract In this article, we present novel sample preparation methods using a helium ion microscope (HIM). We report the possibility of reshaping, at room temperature, thin metal lines on an electron-transparent membrane: A set of platinum bridges with standard geometry (300 × 200 × 15 nm) was modified at room temperature into different shapes using focused helium (He)-ion beam. Also the applicability of the HIM as a tool for precise modification of silicon (Si) and strontium titanate (SrTiO3) lamellae is shown and discussed. We demonstrated that in situ heating (e.g., at 600 °C) of the samples during He-beam illumination by use of a specially developed heating stage enables production of thin Si and SrTiO3 samples without significant artifacts. The quality of such cuts was inspected by transmission electron microscopy with high-resolution imaging, and the diffraction patterns were analyzed. Copyright © Materials Research Society 2013. Subject Physics & ElectronicsNI - Nano InstrumentationTS - Technical SciencesHigh Tech Systems & MaterialsElectronicsIndustrial InnovationDifferent shapesHeating stageHelium ion microscope (HIM)Helium ion microscopesHigh-resolution imagingIn-situ heatingRoom temperatureSample preparation methodsImage reconstructionSiliconStrontium titanatesTransmission electron microscopyIon microscopes To reference this document use: http://resolver.tudelft.nl/uuid:2dd9964d-5294-4a81-b3eb-5d859b3c1195 TNO identifier 472014 ISSN 0884-2914 Source Journal of Materials Research, 28 (8), 1013-1020 Document type article Files To receive the publication files, please send an e-mail request to TNO Library.