On the resolution of subsurface atomic force microscopy and its implications for subsurface feature sizing

Title

On the resolution of subsurface atomic force microscopy and its implications for subsurface feature sizing

Author

Piras, D.
van Neer, P.L.M.J.
Thijssen, R.M.T.
Sadeghian, H.

Publication year

2020

Subject

High Tech Systems & Materials
Industrial Innovation
Stiffness
Topography
Contact Stiffness
Imaging Contrast
Lateral Resolution
Quantitative Approach
Research Studies
Spatial Resolution
Sub-Surface Imaging
Subsurface Features
Atomic Force Microscopy

To reference this document use:

http://resolver.tudelft.nl/uuid:2d3bad24-4d71-4e15-bbb1-aced4e2fc056

DOI

https://doi.org/10.1063/1.5140427

TNO identifier

878164

Publisher

AIP Publishing

ISSN

0034-6748

Source

Review of Scientific Instruments, 91 (8)

Article number

83702

Document type

article