Title
Atmospheric spatial atomic-layer-deposition of Zn(O, S) buffer layer for flexible Cu(In, Ga)Se2 solar cells: From lab-scale to large area roll to roll processing
Author
Frijters, C.H.
Bolt, P.J.
Poodt, P.W.G.
Knaapen, R.
van den Brink, J.
Ruth, M.
Bremaud, D.
Illiberi, A.
Publication year
2016
Abstract
In this manuscript we present the first successful application of a spatial atomic-layer-deposition process to thin film solar cells. Zn(O,S) has been grown by spatial atomic layer deposition (S-ALD) at atmospheric pressure and applied as buffer layer in rigid and flexible CIGS cells by a lab-scale (15x15 cm2) S-ALD set-up. We achieved values of cell efficiency (16 %) higher than the reference cells on glass substrate.
Subject
Nano Technology
TFT - Thin Film Technology
TS - Technical Sciences
Materials
Industrial Innovation
Atmospheric pressure
ALD
Deposition
Semiconducting selenium compounds
Solar cells
Thin film solar cells
Cu(in,ga)se2
Roll-to-roll processing
Zn(O,S)
Spatial atomic layer deposition
To reference this document use:
http://resolver.tudelft.nl/uuid:2adac258-263a-4c62-960b-854fa2af2d1c
DOI
https://doi.org/10.1109/pvsc.2016.7749856
TNO identifier
575371
Publisher
Institute of Electrical and Electronics Engineers Inc.
ISBN
9781509027248
ISSN
0160-8371
Source
43rd IEEE Photovoltaic Specialists Conference, PVSC 2016. 5 June 2016 through 10 June 2016, 1449-1451
Article number
7749856
Document type
conference paper