New options in advanced atomic layer processing

Title

New options in advanced atomic layer processing

Author

Roozeboom, F.

Publication year

2016

Subject

2015 Nano Technology
TFT - Thin Film Technology
TS - Technical Sciences
Materials
Industrial Innovation
Atomic layer deposition
ALD
Atomic layer etching
ALE

To reference this document use:

http://resolver.tudelft.nl/uuid:290f1b17-98fe-4f7b-9ccb-7351b99b852d

TNO identifier

573981

Bibliographical note

University College Cork Seminar, March 9, 2016.

Document type

public lecture