Title
Improved sub-surface AFM using photothermal excitation
Author
Keyvani Janbahan, A.
van Reijzen, M.E.
Tamer, M.S.
van Es, M.H.
van Riel, M.C.J.M.
Sadeghian Marnani, S.
van der Lans, M.J.
Publication year
2019
Subject
AFM
Subsurface imaging
Frequency modulation
Photothermal excitation
Critical dimensions and overlay metrology
High Tech Systems & Materials
Industrial Innovation
To reference this document use:
http://resolver.tudelft.nl/uuid:1dff75bf-5c29-43b3-8997-21a3871f7d6f
TNO identifier
873678
Publisher
TNO, Delft
Source
Proceedings Metrology, Inspection, and Process Control for Microlithography XXXII, 2018, San Jose, CA, USA
Document type
public lecture