Title
Encapsulation method for atom probe tomography analysis of nanoparticles
Author
Larson, D.J.
Giddings, A.D.
Wub, Y.
Verheijen, M.A.
Prosa, T.J.
Roozeboom, F.
Rice, K.P.
Kessels, W.M.M.
Geiser, B.P.
Kelly, T.F.
Publication year
2015
Abstract
Open-space nanomaterials are a widespread class of technologically important materials that are generally incompatible with analysis by atom probe tomography (APT) due to issues with specimen preparation, field evaporation and data reconstruction. The feasibility of encapsulating such non-compact matter in a matrix to enable APT measurements is investigated using nanoparticles as an example. Simulations of field evaporation of a void, and the resulting artifacts in ion trajectory, underpin the requirement that no voids remain after encapsulation. The approach is demonstrated by encapsulating Pt nanoparticles in an ZnO:Al matrix created by atomic layer deposition, a growth technique which offers very high surface coverage and conformality. APT measurements of the Pt nanoparticles are correlated with transmission electron microscopy images and numerical simulations in order to evaluate the accuracy of the APT reconstruction.
Subject
Nano Technology
TFT - Thin Film Technology
TS - Technical Sciences
Materials
Industrial Innovation
Atom probe tomography
Field evaporation
Simulation
Nanoparticles
To reference this document use:
http://resolver.tudelft.nl/uuid:19facac2-ef1e-4966-82c0-2acd6b93768e
DOI
https://doi.org/10.1016/j.ultramic.2015.02.014
TNO identifier
525118
Publisher
Elsevier
ISSN
0304-3991
Source
Ultramicroscopy, 7 (6), 3671-3675
Document type
article