Perspectives of Atomic Layer Etching and related processing

Title

Perspectives of Atomic Layer Etching and related processing

Author

Roozeboom, F.

Publication year

2016

Subject

2015 Nano Technology
HOL - Holst
TS - Technical Sciences
Materials
Industrial Innovation
Atomic layer etching
ALE
Nanowire
Atomic layer processing
Litography

To reference this document use:

http://resolver.tudelft.nl/uuid:182e05d3-1917-420d-9b11-4e38ab43fd00

TNO identifier

573977

Bibliographical note

NaMLab Novel High-k Application Workshop, Dresden, March 14th and 15th, 2016.

Document type

public lecture