Title
Low-temperature IGZO TFT backplane and its application in flexible AMOLED displays on ultrathin polymer films
Author
van der Steen, J.L.P.J.
Tripathi, A.K.
Maas, J.P.V.
van Diesen-Tempelaars, K.
van Leuken, L.B.
de Haas, G.J.A.J.F.
van der Putten, J.B.P.H.
Yakimets, I.
Li, F.M.W.
Ellis, T.H.
van Mol, A.M.B.
Gelinck, G.H.
Vicca, P.
Smout, S.
Ameys, M.
Huei Ke, T.
Steudel, S.
Nag, M.
Schols, S.
Genoe, J.
Heremans, P.
Fukui, Y.
Green, S.
Publication year
2013
Abstract
We present a low-temperature metal oxide transistor backplane technology using PECVD dielectrics. We show successful integration of the backplane in flexible 200ppi AMOLED displays on ultrathin polymer films. The displays are encapsulated with a thin-film barrier and the total stack thickness is less than 150μm.
Paper presented during the International Display Workshops 2013, Sapporo, Japan, 4-6 december.
Subject
Mechatronics, Mechanics & Materials
HOL - Holst
TS - Technical Sciences
Science
Industrial Innovation
Flexible
Low-temperature
Displays
AMOLED
Metal-Oxide semiconductors
To reference this document use:
http://resolver.tudelft.nl/uuid:15613ade-8eb8-44ac-8e0d-e910ec3445f6
TNO identifier
484104
Source
Proceedings of the International Display Workshops, 20, 1568-1596
Document type
conference paper