Title
Silicon Compatible Emerging Materials, Processes, and Technologies for Advanced CMOS and Post-CMOS Applications 11
Author
Roozeboom, F.
Contributor
Jagannathan, H. (editor)
Timans, P.J. (editor)
Kakushima, K. (editor)
Gusev, E.P. (editor)
Karim, Z. (editor)
Misra, D. (editor)
Obeng, Y. (editor)
DeGendt, S. (editor)
Roozeboom, F. (editor)
Publication year
2021
To reference this document use:
http://resolver.tudelft.nl/uuid:14bd41e3-3901-47af-81e4-c9eb67e7e0ef
TNO identifier
956236
Publisher
Electrochemical Society Inc. (ECS)
ISBN
9781607689140
ISSN
1938-6737
Series
ECS Transactions
Bibliographical note
International Symposium on Silicon Compatible Emerging Materials, Processes, and Technologies for Advanced CMOS and Post-CMOS Applications 9 - 235th ECS Meeting; Dallas; United States; 26 May 2019 through 30 May 2019
Document type
conference paper