Print Email Facebook Twitter Feasibility study of photo thermal acoustic imaging of buried nanowires in Gate-All-Around Nanowire FETs Title Feasibility study of photo thermal acoustic imaging of buried nanowires in Gate-All-Around Nanowire FETs Author van Neer, P.L.M.J. Piras, D. Koek, W. van Zwet, E. Sadeghian, H. Publication year 2017 Subject 2015 Nano Technology 2015 Observation, Weapon & Protection SystemsOM - Opto-Mechatronics OPT - Optics AS - Acoustics & SonarTS - Technical SciencesNanowirePhoto Thermal Acoustic ImagingPTAI To reference this document use: http://resolver.tudelft.nl/uuid:13e21cfd-22a8-403f-bda6-e69658c544cd DOI https://doi.org/10.1109/ultsym.2017.8092069 TNO identifier 782913 Publisher IEEE Computer Society ISBN 9781538633830 ISSN 1948-5719 Source 2017 IEEE International Ultrasonics Symposium, IUS 2017. 6 September 2017 through 9 September 2017 Article number 8092069 Document type conference paper Files To receive the publication files, please send an e-mail request to TNO Library.