Title
Progress in EUV optics lifetime expectations
Author
Mertens, B.M.
Weiss, M.
Meiling, H.
Klein, R.
Louis, E.
Kurt, R.
Wedowski, M.
Trenkler, H.
Wolschrijn, B.T.
Jansen, R.
van de Runstraat, A.
Moors, R.
Spee, C.I.M.A.
Plöger, S.
van de Kruijs, R.
Technisch Physische Dienst TNO - TH
Publication year
2004
Abstract
Optics lifetime and contamination is one of the major challenges for extreme ultraviolet (EUV) lithography. The basic contamination and lifetime limiting processes are carbon growth and oxidation of the mirrors. Without appropriate measures, optics lifetime will be limited to a few hours. Within the EUV α-tool project of ASML and Carl Zeiss, several potential solutions towards improvement of optics life time are being studied: vacuum improvement, capping layers for oxidation protection, mitigation of carbon growth and development of efficient cleaning techniques that are soft to the mirror. For instance, we have been able to identify a capping layer that shows carbon growth even under extremely oxidizing conditions. The current status of our experiments leads us to believe that a lifetime of 1000 h is within reach.
Subject
Cap layers
Carbon growth
EUV lithography
Optics lifetime
Oxidation
Auger electron spectroscopy
Crack initiation
Hydrocarbons
Imaging techniques
Lithography
Microoptics
Mirrors
Optical systems
Optics lifetime
Ultraviolet radiation
To reference this document use:
http://resolver.tudelft.nl/uuid:11bcae1d-3135-4abf-9348-bc6419421e09
TNO identifier
237782
Publisher
Elsevier, Amsterdam
ISSN
0167-9317
Source
Microelectric Engineering, 73-74, 16-22
Bibliographical note
Als paper gepresenteerd op: Micro and Nano Engineering 2003, 22-25 September 2003, Cambridge, UK
Document type
article