Title
Closed-loop control of a laser assisted carbon nanotube growth process for interconnects in flexible electronics
Author
van de Burgt, Y.
Bellouard, Y.
Mandamparambil, R.
Dietzel, A.H.
Publication year
2012
Abstract
A feedback control mechanism based on infrared radiation monitoring coupled with reflectivity information was developed to control the temperature of a laser assisted chemical vapor deposition process for the growth of carbon nanotube forests. An infrared laser operating at 808 nm is focused on a silicon substrate containing a 20 nm-aluminum-oxide layer and a 1.5 nm-iron catalyst layer. The growth takes place in an argon/ hydrogen/ ethylene gaseous environment. SEM and Raman spectroscopy analysis show that good controllability and reproducibility is achieved over multiple experiments. © 2011 Materials Research Society.
Subject
Mechatronics, Mechanics & Materials
HOL - Holst
TS - Technical Sciences
High Tech Systems & Materials
Physics
Industrial Innovation
To reference this document use:
http://resolver.tudelft.nl/uuid:0cfea4c6-46aa-498b-afbb-aceed14efb43
TNO identifier
445673
ISBN
9781605113425
ISSN
0272-9172
Source
2011 MRS Spring Meeting, 25-April 2011, San Francisco, CA, USA, 1365, 75-80
Series
Materials Research Society Symposium Proceedings
Document type
conference paper