Print Email Facebook Twitter Closed-loop control of a laser assisted carbon nanotube growth process for interconnects in flexible electronics Title Closed-loop control of a laser assisted carbon nanotube growth process for interconnects in flexible electronics Author van de Burgt, Y. Bellouard, Y. Mandamparambil, R. Dietzel, A.H. Publication year 2012 Abstract A feedback control mechanism based on infrared radiation monitoring coupled with reflectivity information was developed to control the temperature of a laser assisted chemical vapor deposition process for the growth of carbon nanotube forests. An infrared laser operating at 808 nm is focused on a silicon substrate containing a 20 nm-aluminum-oxide layer and a 1.5 nm-iron catalyst layer. The growth takes place in an argon/ hydrogen/ ethylene gaseous environment. SEM and Raman spectroscopy analysis show that good controllability and reproducibility is achieved over multiple experiments. © 2011 Materials Research Society. Subject Mechatronics, Mechanics & MaterialsHOL - HolstTS - Technical SciencesHigh Tech Systems & MaterialsPhysicsIndustrial Innovation To reference this document use: http://resolver.tudelft.nl/uuid:0cfea4c6-46aa-498b-afbb-aceed14efb43 TNO identifier 445673 ISBN 9781605113425 ISSN 0272-9172 Source 2011 MRS Spring Meeting, 25-April 2011, San Francisco, CA, USA, 1365, 75-80 Series Materials Research Society Symposium Proceedings Document type conference paper Files To receive the publication files, please send an e-mail request to TNO Library.