Title
High speed laser printing and sintering of flexible RFID antennas and fingerprint sensors
Author
Theodorakos, I.
Zacharatos, F.
Makrygianni, M.
Kalaitzis, A.
Koritsoglou, O.
Ankri, J.
Schwarzbaum, A.
Melamed, A.
Giesbers, M.
Arutinov, G.
Tuohi, S.
Arnaldo, D.
Braz, N.
Geremia, R.
Karnakis, D.
Melamed, S.
Kabla, A.
de la Vega, F.
Kariyapperuma, D.
Cobb, B.
Price, R.
Too, P.
Norval, S.
Zergioti, I.
Publication year
2020
Abstract
The recent developments in the field of large area, flexible and printed electronics have fueled substantial advancements in Laser Printing and Laser Sintering, which have been attracting interest over the past decade. Resulting applications, ranging from flexible displays and sensors, to biometric devices and healthcare, have already showcased transformational advantages in terms of form factor, weight and durability. In HiperLAM project, Laser-Induced Forward Transfer (LIFT), combined with high speed laser micro-sintering are employed, as digital microfabrication tools for the demonstration of fully functional RFID antennas and fingerprint sensors based on highly viscous Ag and Cu nanoparticle inks. Having previously successfully demonstrated complex structures, this work's focus is on increasing the process throughput and yield by increasing the laser repetition rate (up to 40 kHz) and scanning speed (up to 2 m/s), without compromising reliability and resolution. In order to gain insight into the effects of the incremented repetition rate on the printing procedure, the latter was monitored in real time via a high-speed camera, able to acquire up to 540.000 fps, coupled to the setup. Examples of resulting structures comprise well-defined interdigitated and spiral micro-electrodes with post-sintering electrical resistivity lower than 5 x bulk Ag and 3 x bulk Cu. The aforementioned results validate the compatibility of laser based processing with the field of flexible RFID tags and OTFT based fingerprint sensors and foster the wider adoption of LIFT and laser micro-sintering technology for laboratory and industrial use.
Subject
Flexible electronics
Laser Induced Forward Transfer
Laser Printing
Laser Sintering
Metal nanoparticle inks
To reference this document use:
http://resolver.tudelft.nl/uuid:021f6160-25ba-40ee-a3ee-2650e85d65e3
DOI
https://doi.org/10.1117/12.2561050
TNO identifier
875842
Publisher
SPIE
ISBN
9781510632974
ISSN
0277-786X
Source
Proceedings of SPIE - The International Society for Optical Engineering, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXV 2020, 3 February 2020 through 5 February 2020
Article number
1126709
Document type
conference paper