Pilot roll-to-roll PECVD system for fabrication of thin film Si solar cells
conference paper
Our aim is the development of high-throughput production technology for high efficiency, amorphous and microcrystalline thin film silicon solar cells on flexible substrates. A roll-to-roll system, the FLEXICOAT300, is developed with three deposition chambers for the continuous deposition of, respectively, n-type Si, intrinsic Si and p-type Si. Novel RF and MW sources for plasma enhanced chemical vapour deposition (PECVD) are introduced in the roll-to-roll coater. The first trial depositions of a-Si solar cells show a promising efficiency of > 4 %.
TNO Identifier
821549
Publisher
ECN
Source title
The International Conference on Coatings on Glass and Plastics (ICCG), Eindhoven, The Netherlands, 15-19 juni 2008.
Collation
4 p.
Place of publication
Petten
Pages
4 p.
Files