Print Email Facebook Twitter In-situ localized carbon nanotube growth inside partially sealed enclosures Title In-situ localized carbon nanotube growth inside partially sealed enclosures Author van de Burgt, Y. Champion, A. Bellouard, Y. Publication year 2013 Abstract Carbon nanotube assemblies can be used for specific applications such as sensors and filters. We present a method and proof-of-concept to directly grow vertically-aligned carbon nanotube structures within sealed enclosures by means of a feedback-controlled laser-assisted chemical vapor deposition technique. The process is compatible with a variety of micro-fabrication processes and bypasses the need for post-process packaging. Our experiments raise interesting observations related to the gas diffusion dynamics in micro-scale and sub-micron enclosures. Subject TS - Technical SciencesMechatronics, Mechanics & MaterialsAnd filtersCarbon nanotube structuresCarbon nanotube growthGas diffusionLaser-assisted chemical vapor depositionsNanotube assembliesPost processProof of conceptChemical vapor depositionHOL - Holst To reference this document use: http://resolver.tudelft.nl/uuid:c569ed9a-7f9b-4217-aa87-934cc552ebf7 DOI https://doi.org/10.1063/1.4821952 TNO identifier 482974 Publisher AIP Publishing ISSN 2158-3226 Source AIP Advances, 3 (3), 092119-1 - 092119-6 Document type article Files PDF burgt-2013-in-situ.pdf