Print Email Facebook Twitter Laser-induced spatially-selective tailoring of high-index dielectric metasurfaces Title Laser-induced spatially-selective tailoring of high-index dielectric metasurfaces Author Berzins, J. Indrisiūnas, S. Fasold, S. Steinert, M. Zukovskaja, O. Cialla-May, D. Gecys, P. Bäumer, S.M.B. Pertsch, T. Setzpfandt, F. Publication year 2020 Abstract Optically resonant high-index dielectric metasurfaces featuring Mie-type electric and magnetic resonances are usually fabricated by means of planar technologies, which limit the degrees of freedom in tunability and scalability of the fabricated systems. Therefore, we propose a complimentary post-processing technique based on ultrashort (≤ 10 ps) laser pulses. The process involves thermal effects: crystallization and reshaping, while the heat is localized by a high-precision positioning of the focused laser beam. Moreover, for the first time, the resonant behavior of dielectric metasurface elements is exploited to engineer a specific absorption profile, which leads to a spatially-selective heating and a customized modification. Such technique has the potential to reduce the complexity in the fabrication of non-uniform metasurface-based optical elements. Two distinct cases, a spatial pixelation of a large-scale metasurface and a height modification of metasurface elements, are explicitly demonstrated. Subject High Tech Systems & MaterialsIndustrial InnovationDegrees of freedom (mechanics)Magnetic resonanceFabricated systemFocused laser beamsHigh precision positioningPlanar technologyPost-processing techniquesResonant behaviorSelective heatingSpecific absorptionLaser beam effects To reference this document use: http://resolver.tudelft.nl/uuid:bfa636cf-16f3-4433-9ddb-02322302b07e DOI https://doi.org/10.1364/oe.380383 TNO identifier 873518 Publisher Optical Society of America OSA ISSN 1094-4087 Source Optics Express, 28 (2), 1539-1553 Document type article Files To receive the publication files, please send an e-mail request to TNO Library.