Print Email Facebook Twitter Advances of TNO's electromagnetic deformable mirror development Title Advances of TNO's electromagnetic deformable mirror development Author Kuiper, S. Doelman, N.J. Human, J.D. Saathof, R. Klop, W.A. Maniscalco, M.P. Contributor Geyl, R. (editor) Navarro, R. (editor) Publication year 2018 Abstract TNO is developing Deformable Mirror (DM) technology, targeted for aberration correction in high-end Adaptive Optics (AO) applications in the field of lithography, astronomy, space and laser communication. The heart of this deformable mirror technology is a unique actuator technology based on the variable reluctance principle. The main advantages of this technology are the inherent high reliability, linearity (>99%), and high efficiency in terms of force per volume and unit power. Based on this actuator technology TNO built and tested a prototype DM, with 57 actuators, and a mirror diameter of Ø160mm. The test results show a highly linear actuator response, with less than 1% hysteresis over a stroke of 40μm. Atmospheric aberration correction has been shown with these DM's in a free space laser-communication bread board. The same actuator technology is also used in the application of a highly compact Fine Steering Mirror (FSM), with an overall volume of Ø27x30mm, with a Ø20mm mirror. This FSM is targeted for satellite-based lasercommunication terminals. Furthermore, a design study has been carried out to show the scalability of this technology towards large (~Ø1m to ~Ø3m) adaptive (secondary) mirrors with several hundreds, up to thousands of actuators. In this paper these different DM and FSM's are discussed, and the latest test results obtained with the DM prototypes are presented. Subject High Tech Systems & MaterialsElectronicsIndustrial InnovationAdaptive opticsAdaptive secondaryFine steering mirrorsLinear actuatorsDeformationDelta modulationLaser applicationsLaser mirrorsTelescopesAberration correctionActuator technologyAtmospheric aberrationDeformable mirrorsFree space laser communicationsVariable reluctance To reference this document use: http://resolver.tudelft.nl/uuid:b7abe812-796c-406e-800a-a0ccadfa7e03 TNO identifier 842690 Publisher SPIE ISBN 9781510619654 ISSN 0277-786X Source Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation III 2018, 10-15 June 2018, 10706 Article number 1070619 Document type conference paper Files To receive the publication files, please send an e-mail request to TNO Library.