Print Email Facebook Twitter Quantitative roughness measurements with iTIRM Title Quantitative roughness measurements with iTIRM Author van der Bijl, R.J.M. Fähnle, O.W. van Brug, H. Braat, J.J.M. Technisch Physische Dienst TNO - TH Publication year 2000 Abstract A new method, iTIRM, is used for quantitative surface roughness measurements of ground and polished surfaces and it is shown to be a useful tool for measuring total surface quality instead of individual roughness parameters. Subject ElectronicsSurface measurementsRoughnessNondestructive testing To reference this document use: http://resolver.tudelft.nl/uuid:8da25701-948e-4448-8142-e2b5f3fee703 TNO identifier 525172 Publisher Optical Society of America Source Optical Fabrication and Testing, 18-22 June 2000, Québec, Canada Series OSA Technical Digest Series Document type conference paper Files To receive the publication files, please send an e-mail request to TNO Library.