Title
Atomic Layer Processing: Basics, materials, processes & applications
Author
Roozeboom, F.
Publication year
2017
Subject
Nano Technology
TFT - Thin Film Technology
TS - Technical Sciences
Materials Physics
Industrial Innovation
Atomic layer deposition
ALD
Processes
Applications
To reference this document use:
http://resolver.tudelft.nl/uuid:871016db-5fef-4f6a-bc3a-62deb174ee2f
TNO identifier
575879
Source
IMRE International Workshop on Sub-nm Materials Technologies Workshop, IMRE, Singapore, Jan. 16, 2017
Bibliographical note
Presentation (invited) during the International Workshop on Sub-nm Materials Technologies, Singapore, Jan. 16, 2017
Document type
public lecture