Print Email Facebook Twitter Submicrometer Nanostructure-Based RGB Filters for CMOS Image Sensors Title Submicrometer Nanostructure-Based RGB Filters for CMOS Image Sensors Author Berzins, J. Fasold, S. Pertsch, T. Bäumer, S.M.B. Setzpfandt, F. Publication year 2019 Abstract Digital color imaging relies on spectral filters on top of a pixelated sensor, such as a CMOS image sensor. An important parameter of imaging devices is their resolution, which depends on the size of the pixels. For many applications, a high resolution is desirable, consequently requiring small spectral filters. Dielectric nanostructures, due to their resonant behavior and its tunability, offer the possibility to be assembled into flexible and miniature spectral filters, which could potentially replace conventional pigmented and dye-based color filters. In this paper, we demonstrate the generation of transmissive structural colors based on uniform-height amorphous silicon nanostructures. We optimize the structures for the primary RGB colors and report the construction of submicrometer RGB filter arrays for a pixel size down to 0.5 ?m. Subject High Tech Systems & MaterialsIndustrial InnovationDielectric nanostructuresRGBSubmicrometer pixelsColor filtersImage sensors To reference this document use: http://resolver.tudelft.nl/uuid:347ef5aa-3590-4ce9-8a76-581ab8286930 TNO identifier 866874 Publisher American Chemical Society ACS ISSN 2330-4022 Source ACS Photonics, 6 (4), 1018-1025 Document type article Files To receive the publication files, please send an e-mail request to TNO Library.