Title
Submicrometer Nanostructure-Based RGB Filters for CMOS Image Sensors
Author
Berzins, J.
Fasold, S.
Pertsch, T.
Bäumer, S.M.B.
Setzpfandt, F.
Publication year
2019
Abstract
Digital color imaging relies on spectral filters on top of a pixelated sensor, such as a CMOS image sensor. An important parameter of imaging devices is their resolution, which depends on the size of the pixels. For many applications, a high resolution is desirable, consequently requiring small spectral filters. Dielectric nanostructures, due to their resonant behavior and its tunability, offer the possibility to be assembled into flexible and miniature spectral filters, which could potentially replace conventional pigmented and dye-based color filters. In this paper, we demonstrate the generation of transmissive structural colors based on uniform-height amorphous silicon nanostructures. We optimize the structures for the primary RGB colors and report the construction of submicrometer RGB filter arrays for a pixel size down to 0.5 ?m.
Subject
High Tech Systems & Materials
Industrial Innovation
Dielectric nanostructures
RGB
Submicrometer pixels
Color filters
Image sensors
To reference this document use:
http://resolver.tudelft.nl/uuid:347ef5aa-3590-4ce9-8a76-581ab8286930
TNO identifier
866874
Publisher
American Chemical Society ACS
ISSN
2330-4022
Source
ACS Photonics, 6 (4), 1018-1025
Document type
article