Title
Active-matrix mesh electronics thin-film-transistor arrays for biometrics-under-display and biomedical applications
Author
Kronemeijer, A.J.
Peeters, B.
de Haas, G.
Verbeek, R.
Bel, T.
van de Laar, R.
Ugalde Lopez, L.A.
Peters, L.C.J.M.
Gelinck, G.H.
Publication year
2021
Abstract
A monolithic manufacturing process is presented for the realization of active-matrix meshed thin-film-transistor (TFT) arrays on foil with physical voids between pixels, realizing membrane-like electronic arrays. The process is scalable to large-area substrates and enables (improved performance of) biometrics-under-display applications. Moreover, membrane-like TFT arrays provide opportunities for the use of TFT technology, and broader large-area thin-film electronics, in new applications in the domain of biomedical electronics, as demonstrated by example use cases of in vivo electrophysiology of the brain as well as in vitro electrophysiology in smart microwell plates.
Subject
AMOLED
Biomedical electronics
Biometrics-under-display
Membranes
Mesh electronics
Smart microwell plates
TFT arrays
To reference this document use:
http://resolver.tudelft.nl/uuid:086f8f41-22dd-4985-8fd6-e3ca8a42348e
DOI
https://doi.org/10.1002/jsid.1025
TNO identifier
956624
Publisher
Wiley
Source
Journal of the Society for Information Display, 29 (29), 390-404
Document type
article