Title
MFIG - a Mass Filtered Ion Gauge
Author
Bekman, H.H.P.T.
Westland, Y.
Elstgeest, T.H.
Mechielsen, T.W.
Haye, M.J.
Emmelkamp, J.
Molkenboer, F.T.
Koster, N.B.
Lensen, H.A.
Publication year
2022
Abstract
MFIG is a metrology tool for detecting low levels of contamination (Volatile Organic Compounds (VOC) and Airborne Molecular Contamination (AMC)). MFIG consist of an ion source followed by an electrostatic lens for beam focus control. After the electrostatic lens mass separation is achieved with a static magnet field. Detection is done by a Faraday cup.
Subject
High Tech Systems & Materials
Industrial Innovation
To reference this document use:
http://resolver.tudelft.nl/uuid:02a5a0d2-9014-44a1-bcec-4d318b8d7d72
TNO identifier
977193
Publisher
TNO, Delft
Source
IVC-22, 22nd International Vacuum Congress, Saporro, Japan, 11-16 September 2022
Document type
public lecture